CKD Thin electro pneumatic regulator MEVT
Thin, compact electro pneumatic regulator with reduced wiring.
Ideal for pressure control and fine speed cylinder control in semiconductor and precise processing fields.
特点和优点

[14 mm thin and 80 g lightweight]
With this high integration type, up to 24 manifold stations can be used.

[Supports reduced wiring]
Supports serial transmission (DeviceNet, CC-Link), centralized terminal block, D sub-connector.

[2 mounting directions]
It can be mounted in two directions, bottom and back.

[High precision / high-speed response]
Repeatability: 0.3% F.S.
Response time: 0.1 sec (no load)


规格参数
Model No.Product namePressure control range (MPa)Port size (φ)Remarks
EVTSingle unit0-0.14, 6
MEVTManifold0-0.54, 6


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